We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Vacuum deposition equipment.
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Vacuum deposition equipment Product List and Ranking from 9 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Vacuum deposition equipment Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. テルモセラ・ジャパン 本社 Tokyo//Industrial Electrical Equipment
  2. ラボテック Tokyo//others
  3. グリーンテック 大阪本社 Osaka//Trading company/Wholesale
  4. シエンタ オミクロン Tokyo//Testing, Analysis and Measurement
  5. 5 テガサイエンス Chiba//Trading company/Wholesale
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Vacuum deposition equipment Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Vacuum Deposition Device "LA-V5050" ラボテック
  2. Information on the sale of used vacuum equipment and devices. グリーンテック 大阪本社
  3. Vacuum Deposition Device "nanoPVD-T15A" テルモセラ・ジャパン 本社
  4. 4 Vacuum Deposition Device "MiniLab-080" テルモセラ・ジャパン 本社
  5. 4 Vacuum deposition device 'MiniLab-090' (for glove box) テルモセラ・ジャパン 本社

Vacuum deposition equipment Product List

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Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

  • Sputtering Equipment

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Vacuum Deposition Device "LA-V5050"

Vacuum Deposition Device "LA-V5050"

Vacuum deposition equipment that can be used as a pre-treatment device for TEM, SEM, and EPMA, as well as for the production of thin films and electrode films.

Labotech Inc.'s "LA-V5050" is a standard resistance heating vacuum deposition device. It is a desktop-type low-cost turbo vacuum deposition device designed with a focus on operability. It can quickly achieve a high vacuum state, making it suitable for pre-processing for TEM, SEM, and EPMA. Additionally, by selecting a cartridge holder, it can be used as a thin film device/electrode film production device. 【Features】 ■ Desktop type ■ Focus on operability ■ Speedy *For more details, please contact us or download the catalog.

  • Other physicochemical equipment

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[Equipment Introduction] Large Vacuum Deposition System

[Equipment Introduction] Large Vacuum Deposition System

We provide highly reliable products! We are equipped with advanced measuring and processing machines tailored to our expertise.

We would like to introduce the "Large Vacuum Deposition Equipment" owned by Okamoto Optics Co., Ltd. We possess two types of deposition: EB deposition and IAD deposition. Additionally, we are equipped with numerous facilities, including polishing machines, interferometers, and three-dimensional measuring devices. Our company is characterized by its ability to perform high-precision processing of large lenses and flat surfaces, and we can accommodate not only glass but also ceramics. Please feel free to contact us if you have any requests. 【Features】 - In-house equipped with advanced measuring and processing machines tailored to our know-how - Capable of providing highly reliable products - High-precision processing of large lenses and flat surfaces - Accommodates both glass and ceramics *For more details, please download the PDF or feel free to contact us.

  • Evaporation Equipment

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BAK Family Fully Automatic Vapor Deposition Function Equipped

BAK Family Fully Automatic Vapor Deposition Function Equipped

Introducing the BAK deposition platform that allows for various chamber sizes and process automation options.

The "BAK Family," a deposition machine equipped with a new level of flexibility and process control, not only provides deposition work for power devices, wireless, LEDs, MEMS, and photonics but also represents a new generation of deposition equipment that achieves automatic substrate exchange and high throughput. From the compact BAK501 for universities and research institutions to the Multi BAK for mass production, we can propose a suitable BAK for all customers, from research and development to mass production. 【Features】 ■Selectable deposition distances from 0.5m to 2.0m ■Highly flexible processes that allow the use of multiple materials without vacuum break ■Fully automated options incorporating load locks and loading robots *For more details, please refer to the related links or feel free to contact us.

  • Evaporation Equipment

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Vacuum Deposition Device HSV Series

Vacuum Deposition Device HSV Series

Compact appearance and excellent internal mechanism.

A vacuum deposition device designed as the most versatile equipment for small-lot production, starting with experimental devices at universities and various research institutions.

  • Vacuum Equipment

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Cluster Systems (Vacuum Deposition Equipment)

Cluster Systems (Vacuum Deposition Equipment)

This is an introduction to the vacuum deposition device.

○FZ Juelich Cluster -Installed at the HNF (Helmholtz Nanofabrication Facility) Juelich, Germany ○IQC Cluster Tool -Installed at the Institute for Quantum Computing at the University of Waterloo, Canada ○EIT+ Cluster Tool -Installed at the Wroclaw Research Centre EIT+, Wroclaw, Poland ○UTD Cluster Tool -Installed at the University of Texas at Dallas, USA ○FW Dresden Cluster ○Materials Innovation Platform ※For details on each device, please contact us.

  • Analytical Equipment and Devices

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Information on the sale of used vacuum equipment and devices.

Information on the sale of used vacuum equipment and devices.

All models are overhauled and delivered in a fully operational state.

At Green Tech Co., Ltd., we conduct complete overhauls and sell, maintain, and rent used vacuum equipment and devices that have been performance-verified. Our product lineup includes sputtering devices and vacuum deposition equipment, as well as measuring instruments like He leak detectors, and individual items such as power supplies, electron guns, vacuum gauges, and pumps. Please feel free to contact us if you have any requests. [Features] ■ Abundant stock of sales items ■ Complete overhauls conducted *For more details, please contact us.

  • Vacuum Equipment
  • Vacuum pump
  • valve

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Comprehensive Catalog - Vacuum Deposition Equipment

Comprehensive Catalog - Vacuum Deposition Equipment

A complete flow that you can trust to handle everything from model selection to consumable supply and after-sales support.

This catalog is a comprehensive catalog from Craft Co., Ltd., a specialized manufacturer of vacuum deposition equipment. (*Prostaff Co., Ltd. acts as a sales manufacturer for Craft Co., Ltd., while Prostaff plays a role in the manufacturing sector.) It includes a wide range of products, starting with the automatic vacuum deposition equipment [custom-made] CAP series, as well as maintenance menus and introductions to processed products. [Contents] ■ Automatic vacuum deposition equipment [custom-made] ■ Refurbished items [used items] ■ Equipment maintenance ■ Parts maintenance ■ Deposition materials and processed products, etc. *For more details, please download the PDF or feel free to contact us.

  • Vacuum Equipment

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Vacuum Deposition Device "MiniLab-080"

Vacuum Deposition Device "MiniLab-080"

Flexible configuration available upon request for methods such as deposition, sputtering, and EB. Adopts a tall chamber with a height of 570mm, contributing to improved uniformity during deposition.

The ML-080, with a volume of 80 liters and dimensions of 400(W)x400(D)x570(H)mm, is composed of a D-type box chamber. It has the same configuration as the 060 model but features a taller chamber, which extends the TS distance adjustment range and improves film uniformity during deposition on large-diameter substrates, making it an optimal model for vacuum deposition. It is a higher-end model than the ML-060, which can also accommodate a load lock mechanism. Like the 060, it is compact yet supports a wide range of applications including resistance heating deposition (for metals, insulators, and organic materials), EB deposition, RF/DC/PulseDC compatible magnetron sputtering, RIE plasma etching, CVD, and annealing. - Maximum substrate size: Φ10 inches - Resistance heating deposition sources x up to 4 sources - Organic deposition sources x up to 4 sources - Magnetron sputtering cathodes x 4 sources - Electron beam deposition - Substrate heating stage (standard 500°C, max 1000°C) - *Plasma etching / <30W soft etching - CVD (thermal CVD, PECVD) *Plasma etching can be installed in both the main chamber and the load lock chamber.

  • Evaporation Equipment
  • Sputtering Equipment
  • Etching Equipment

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Vacuum deposition device 'MiniLab-090' (for glove box)

Vacuum deposition device 'MiniLab-090' (for glove box)

Storage-compatible glove box PVD flexible thin film experimental device, featuring a tall chamber with a height of 570mm, contributes to improved uniformity during deposition.

MiniLab-080 glove box model with an 80ℓ large capacity chamber designed to be stored within a glove box bench. It features a slide-open and close chamber that maximizes the use of the workbench, and a rear-opening door designed with maintenance in mind. Samples processed can be consistently handled within a controlled environment inside the glove box without exposure to the atmosphere or moisture. For specifications of the GB gas purification unit, please refer to the GB model. ◉ Resistance heating evaporation source x up to 4 ◉ Organic evaporation source x up to 4 ◉ Magnetron sputtering cathode x 4 ◉ Electron beam evaporation ◉ Dry etching ◉ Annealing

  • Evaporation Equipment
  • Sputtering Equipment
  • Annealing furnace

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Vacuum Deposition Device "MiniLab Series"

Vacuum Deposition Device "MiniLab Series"

Due to its modular embedded design, it is possible to flexibly assemble dedicated machines according to the required film formation methods. A compact thin-film experimental device that can accommodate various research applications.

**Flexible System** The MiniLab thin film experimental device series allows for easy construction of a compact system without waste, even as a customized product, by incorporating components (such as deposition sources and stages) and control modules tailored to the required deposition methods and materials from a wide range of options. By configuring the system with a modular control unit in a Plug&Play manner, the application range expands, enabling various thin film process experiments. The MiniLab series is a high cost-performance system that caters to a wide range of applications from research and development to small-scale production. **Small Footprint & Space-Saving** - Single Rack Type (MiniLab-026): 590(W) x 590(D)mm - Dual Rack Type (MiniLab-060): 1200(W) x 590(D)mm - Triple Rack Type (MiniLab-125): 1770(W) x 755(D)mm **Excellent Operability & Intuitive Operation Screen** Windows PC or 7” touch panel. Easy operation that does not require expertise, with maximum safety considerations.

  • Sputtering Equipment
  • Evaporation Equipment
  • Annealing furnace

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Vacuum Deposition Device "nanoPVD-T15A"

Vacuum Deposition Device "nanoPVD-T15A"

We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.

High-performance organic source LTE (up to 4 sources) with excellent temperature responsiveness/stability for organic materials such as OLED, OPV, and OTFT, and a metal deposition source TE (up to 2 sources) that allows for easy exchange and maintenance. It can operate in manual mode, as well as in automatic modes for continuous multilayer film deposition and simultaneous film deposition. Despite its compact size, it achieves performance similar to that of standalone large machines without sacrificing basic performance, film quality, uniformity, or operability. Additionally, it features fully automated control via a simple touch panel with PLC. The user-friendly HMI allows anyone to operate it intuitively without requiring complicated operating procedures. It comes with remote software "IntelliLink," which connects to a Windows PC via USB cable, enabling monitoring of the device's operating status, log saving, online/offline recipe creation and saving, and fault analysis. This compact vacuum deposition system is designed to maximize the effective use of limited development and lab space while also excelling in maintenance.

  • Evaporation Equipment

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Vacuum Deposition Device "MiniLab-026"

Vacuum Deposition Device "MiniLab-026"

Compact and space-saving! Ideal for research and development, flexible configuration for purposes such as deposition, sputtering, and annealing.

This is a flexible thin film experimental device for R&D that achieves minimal waste, compact size, simple operation, and high cost performance by integrating the necessary minimum modules and controllers into a 19" compact rack with a Plug&Play feel. It supports magnetron sputtering (up to 3 sources) or resistance heating evaporation (metal sources up to 4, organic materials x4), and can be equipped with a substrate heating stage, allowing for the production of annealing devices and plasma etching. There is also a glove box storage type available (specifications to be discussed). A wide range of optional components that can be flexibly customized is available. ◉ Maximum substrate size: Φ6 inch ◉ Resistance heating evaporation source filament, crucible, boat type (up to 4 sources) ◉ Organic evaporation source: 1cc or 5cc ◉ Φ2 inch magnetron cathode (up to 3 sources) ◉ Dry etching ◉ Glove box compatible (optional, specifications to be discussed) ◉ Other options: simultaneous deposition from 2 sources, HiPIMS, automatic thin film controller, custom substrate holders, substrate rotation/lifting, substrate heating, and many more options available. * Please first contact us with your required specifications, and we will configure the system according to your needs.

  • Evaporation Equipment
  • Sputtering Equipment
  • Annealing furnace

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